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气体传感器用Au掺杂WO3基复合涂层的组织及气敏性研究

Study on microstructure and gas sensitivity of Au-doped WO3-based composite coating used in gas sensor

  • 摘要: 为了提高气体传感器的测试精度, 选择等离子喷涂工艺来制备Au掺杂WO3基(WO3/Au)复合涂层, 并对复合涂层的组织和气敏性展开分析。结果表明: 在WO3/Au复合涂层的X射线衍射谱图上, 只观察到WO3与Au对应的两种衍射峰, 没有出现其他物相的衍射峰; 相对于纯WO3涂层, WO3/Au复合涂层没有发生颗粒尺寸、结晶度与微观结构的显著改变; WO3/Au复合涂层的吸脱附曲线发生了分离的现象, 出现了脱附滞后的情况。当温度上升, 气体传感器用纯WO3涂层和WO3/Au复合涂层都出现了响应值先升高到峰值又逐渐降低的现象, 其中最大值出现在300℃处; 不同于纯WO3涂层, 气体传感器用WO3/Au复合涂层可以实现对NO2的快速响应, 并获得更短的恢复时间, 说明WO3/Au复合涂层具备更优的气敏性。

     

    Abstract: To improve the accuracy of gas sensor, the Au-doped WO3-based (WO3/Au) composite coatings were prepared by the plasma spraying process, and the microstructure and gas sensitivity were analyzed. The results show that, only two diffraction peaks, corresponding to Au and WO3, are formed in the X-ray diffraction patterns of the WO3/Au composite coatings, and no other phase diffraction peaks are generated. Compared with the pure WO3 coatings, the WO3/Au composite coatings do not significantly change in the particle size, crystallinity, and microstructure. The separation phenomenon occurs in the desorption curve of the WO3/Au coatings, which results in the desorption lag. When the temperature rises, the response values of the pure WO3 coatings and the WO3/Au composite coatings used in gas sensors rise to the peak and then gradually decrease, and the maximum value appears at 300℃. Compared with the pure WO3 coatings, the WO3/Au composite coatings used in gas sensors can achieve the rapid response to NO2 and obtain the shorter recovery time, showing the better gas sensitivity of WO3/Au composite coatings.

     

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