二硅化钼涂层制备技术研究进展

Research progress on preparation technology of molybdenum disilicide coating

摘要: MoSi₂涂层具有优良的高温抗氧化性能，常作为各种材料的保护涂层。本文结合目前国内外MoSi₂研究现状，详细介绍了等离子喷涂法、包埋渗法、料浆法、熔盐法、磁控溅射法、化学气相沉积法、激光熔覆法、放电等离子烧结法等MoSi₂涂层的制备方法，总结了几种MoSi₂涂层制备工艺的优势、差异和不足，并对MoSi₂涂层制备工艺的改进方法与发展方向进行了展望。

Abstract: Molybdenum disilicide (MoSi₂) coating has the excellent high-temperature oxidation resistance which is widely used as a protective coating of various materials. Based on the current research status of MoSi₂ coatings at home and abroad, the preparation methods of MoSi₂ coatings, such as plasma spraying, pack cementation, slurry method, molten salt method, magnetron sputtering, chemical vapor deposition, laser cladding method, and spark plasma sintering method, were introduced in detail, and the advantages, differences, and shortcomings of those preparation methods for the MoSi₂ coatings were summarized. The improvement and development of the MoSi₂ coating preparation process were also prospected.