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射频等离子体电源输出效率及球形ZrO2粉末制备研究

Study on Output Efficiency of RF Plasma Power Supply and Preparation of Spherical ZrO2 Powder

  • 摘要: 电源输出功率是影响射频等离子体粉末球化工艺的重要参数之一。基于功率差分法,通过对比射频电源在空载与等离子体负载工况下直流侧的功率输出特性,确定射频电源从直流侧传输到射频等离子体的有效功率,并采用射频等离子体对微米级ZrO2粉末进行了球化研究,分析了不同有效输入功率下粉末的形貌与粒度。研究表明,射频传输效率由射频电源的谐振回路决定,且在电子管的工作区间内近似保持恒定;线圈端输出有效功率由42 kW提升至49 kW,粉末逐渐由部分熔融向充分熔融转变,局部气化显著增强,粉末球形度及致密度等性能得到较大提升,粒径减小且粒度分布变窄。射频等离子体处理后的粉末相结构未发生明显变化。上述研究可为后续射频等离子体球化模拟、实验及工艺优化提供功率基准与借鉴。

     

    Abstract: The output power of the RF power supply is one of the key parameters affecting the spheroidization of powders in RF plasma. Based on the power difference method, the effective power transmitted from the DC side of the RF power supply to the plasma was determined by comparing the power output characteristics under no-load and plasma-load conditions. RF plasma was then employed to spheroidize micron-sized ZrO? powders, and the effects of different effective input powers on particle morphology and size were analyzed. The results show that the RF transmission efficiency is determined by the resonant circuit of the RF power supply and remains approximately constant within the operating range of the electron tube. As the effective output power at the coil end increased from 42 kW to 49 kW, the powders gradually transformed from partially molten to fully molten, local vaporization was significantly enhanced, and the powders exhibited markedly improved sphericity and density, along with reduced particle size and narrower size distribution. The phase structure of the powders after RF plasma treatment remained largely unchanged. These findings provide a power reference and guidance for subsequent simulations, experimental studies, and process optimization of RF plasma powder spheroidization

     

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