Research progress on high grade aluminum nitride powder and its carbothermal reduction-nitridation preparation
-
摘要: 氮化铝(AlN)具有高导热、绝缘、低膨胀、无磁等优异性能,是半导体、电真空等领域高端装备的关键材料,特别是在航空航天、轨道交通、新能源装备、高功率LED、5G通讯、电力传输、工业控制等领域功率器件中具有不可取代的作用。高品级粉体是制备高性能陶瓷的基础,氮化铝粉体的性质直接影响了后续的成形、烧结等工艺以及材料的组织和性能。碳热还原氮化法制备氮化铝粉体具有纯度高、粒度细和烧结性好等特点,本文综述了氮化铝粉末的评价指标以及碳热还原氮化法制备氮化铝粉末的研究进展,提出未来研究与产业化的方向与趋势。
-
关键词:
Abstract: Aluminum nitride (AlN) has the characteristics of high thermal conductivity, good insulation, low thermal expansion coefficient and non-magnetic. Therefore, AlN is considered a key material for high-end semiconductor and electric vacuum devices and has been widely applied in the power device manufacturing in the fields of aerospace, rail transportation, new energy equipment, high power LED, 5G communication, power transmission and industrial control. High-grade powder is the basis of high-performance ceramics. The properties of AlN powder directly affect the forming, sintering, and microstructure and performance of AlN ceramics. Carbothermal reduction method is a promising method to produce AlN powders with high purity, fine particle size and high sinterability. This paper reviews the evaluation metrics of AlN powders and the recent progress of carbothermal reduction method, and proposes the potential directions and trends of future research and industrialization.
点击查看大图
计量
- 文章访问数: 204
- HTML全文浏览量: 45
- PDF下载量: 39
- 被引次数: 0