Ji Zhen, Wng Congyu, Xie Yang, Jia Chengchang, Zhang Youcha, Cheng Cheng, Huang Xiaohong. The research of YSZ ceramic coating's preparation techniques on the surface of etching machine process chamber[J]. Powder Metallurgy Technology, 2015, 33(6): 460-464. DOI: 10.3969/j.issn.1001-3784.2015.06.011
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Citation:
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Ji Zhen, Wng Congyu, Xie Yang, Jia Chengchang, Zhang Youcha, Cheng Cheng, Huang Xiaohong. The research of YSZ ceramic coating's preparation techniques on the surface of etching machine process chamber[J]. Powder Metallurgy Technology, 2015, 33(6): 460-464. DOI: 10.3969/j.issn.1001-3784.2015.06.011
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Ji Zhen, Wng Congyu, Xie Yang, Jia Chengchang, Zhang Youcha, Cheng Cheng, Huang Xiaohong. The research of YSZ ceramic coating's preparation techniques on the surface of etching machine process chamber[J]. Powder Metallurgy Technology, 2015, 33(6): 460-464. DOI: 10.3969/j.issn.1001-3784.2015.06.011
|
Citation:
|
Ji Zhen, Wng Congyu, Xie Yang, Jia Chengchang, Zhang Youcha, Cheng Cheng, Huang Xiaohong. The research of YSZ ceramic coating's preparation techniques on the surface of etching machine process chamber[J]. Powder Metallurgy Technology, 2015, 33(6): 460-464. DOI: 10.3969/j.issn.1001-3784.2015.06.011
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