Li Yi, Li Jinpu, Jia Chengchang, Liu Xuequan, Li Fachang, Li Nan. A research on the technique for tungsten films by metal-organic chemical vapor deposition[J]. Powder Metallurgy Technology, 2011, 29(5): 334-338.
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Citation:
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Li Yi, Li Jinpu, Jia Chengchang, Liu Xuequan, Li Fachang, Li Nan. A research on the technique for tungsten films by metal-organic chemical vapor deposition[J]. Powder Metallurgy Technology, 2011, 29(5): 334-338.
|
Li Yi, Li Jinpu, Jia Chengchang, Liu Xuequan, Li Fachang, Li Nan. A research on the technique for tungsten films by metal-organic chemical vapor deposition[J]. Powder Metallurgy Technology, 2011, 29(5): 334-338.
|
Citation:
|
Li Yi, Li Jinpu, Jia Chengchang, Liu Xuequan, Li Fachang, Li Nan. A research on the technique for tungsten films by metal-organic chemical vapor deposition[J]. Powder Metallurgy Technology, 2011, 29(5): 334-338.
|
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