固相烧结制备半导体用Mn–Si粉末多孔合金的性能表征

任伟

doi:10.19591/j.cnki.cn11-1974/tf.2019.06.009

固相烧结制备半导体用Mn–Si粉末多孔合金的性能表征

doi: 10.19591/j.cnki.cn11-1974/tf.2019.06.009

任伟^,

河南建筑职业技术学院设备工程系, 郑州 450064

详细信息

通讯作者:
任伟, E-mail: yuanzhega874029@126.com

中图分类号: TG145
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- 被引次数: 0
出版历程
- 收稿日期: 2018-11-23
- 刊出日期: 2019-12-27

Property characterization of Mn-Si powder porous alloy for semiconductors prepared by solid phase sintering

REN Wei^,

Department of Equipment Engineering, Henan Technical College of Construction, Zhengzhou 450064, China

More Information

Corresponding author: REN Wei, E-mail: yuanzhega874029@126.com

摘要

摘要: 以高纯Si粉和Mn粉为原料, 利用固相烧结技术制备得到Mn-Si粉末多孔合金, 对其组织结构及性能进行表征, 分析烧结过程中孔隙形成机理。结果表明: 600℃烧结温度可得到MnSi粉末, 烧结温度升高到1000℃后, 原有的Si与MnSi衍射峰已全部消失, 烧结体中只剩下Mn₅Si₃物相成分; 烧结体膨胀率和孔隙率都随烧结温度的增加表现出先增加后减小的变化规律, 在烧结温度800℃时取得最大值, 分别为8.86%和54.26%;在Mn颗粒和MnSi相之间存在明显空隙, 随着Si与Mn元素之间扩散的继续, 空隙持续增大进而连通形成层状, 随着烧结温度增加到1000℃, Mn、Si、MnSi被消耗殆尽, 合金中形成Mn₅Si₃结构。
- 固相烧结 /
- 多孔合金 /
- 显微结构 /
- 性能表征
Abstract: The Mn-Si powder porous alloys were prepared by solid phase sintering, using high purity Si powders and Mn powders as the raw materials. The microstructure and properties of Mn-Si powder porous alloys were characterized and the for mation mechanism of pores in sintering process was analyzed. The results show that, the MnSi powders can be obtained at 600℃, with the increase of sintering temperature to 1000℃, the original diffraction peaks of Si and MnSi disappear, only Mn₅Si₃ phase is present inthe sintered body. The expansion ratio and porosity of the sintered body first increase and then decrease with the increase of sintering temperature, and show the maximum values (8.86% and 54.26%) at 800.℃ There is an obvious gap between Mn particles and MnSiphase, as the diffusion between Si and Mn continues, the gaps increase and then connect to form the lamellar structure; as the sintering temperature rises to 1000, Mn, Si, ℃ and MnSi is used up, the Mn₅Si₃ structure is formed.
- solid phase sintering /
- porous alloy /
- microstructure /
- property characterization

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图 1 不同烧结温度下Mn–Si粉末多孔合金压坯试样X射线衍射图谱

Figure 1. XRD spectra of Mn–Si powder porous alloy at different sintering temperatures

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图 2 不同烧结温度下Mn–Si粉末多孔合金显微形貌：（a）400 ℃；（b）600 ℃；（c）800 ℃；（d）1000 ℃

Figure 2. SEM images of Mn–Si powder porous alloy at different sintering temperatures: (a) 400 ℃; (b) 600 ℃; (c) 800 ℃; (d) 1000 ℃

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图 3 不同烧结温度下Mn–Si粉末多孔合金孔隙显微形貌：（a）600 ℃；（b）1000 ℃

Figure 3. Pore morphology of Mn–Si powder porous alloy at different sintering temperatures: (a) 600 ℃; (b) 1000 ℃

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图 4 Mn–Si粉末多孔合金空隙形成机理

Figure 4. Pore-forming mechanism of Mn–Si powder porous alloy

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表 1 不同烧结温度下Mn–Si粉末多孔合金的膨胀率和孔隙率

Table 1. Expansion ratio and porosity of Mn–Si powder porous alloy at different sintering temperatures

烧结温度/ ℃	膨胀率/ %	孔隙率/ %
400	0.62	33.25
600	2.84	38.46
800	8.86	54.26
1000	5.66	51.08

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表 2 不同烧结温度下Mn–Si粉末多孔合金的孔径

Table 2. Pore diameters of Mn–Si powder porous alloy at different sintering temperatures

烧结温度/ ℃	平均孔径/ μm	最大孔径/ μm
400	6.12	11.62
600	5.86	10.86
800	6.84	12.74
1000	10.26	13.85

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