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摘要: 基于增材制造的技术特点, 设计完成了适用于3D打印的阴极热子组件模型, 并通过选择性激光熔融技术一体化3D打印完成了直径为3 mm和5 mm的样品, 并对样品展开了相应的后处理工艺研究, 包括去除支撑结构、热子绝缘防护和浸渍发射盐等。结果表明, 新型组件的热子能够将阴极加热至900~1100℃的工作温度范围; 在水冷阳极二极管中测试, 1100℃下阴极拐点发射电流密度达到7.94 A·cm-2。Abstract: The cathode-heater assembly model for 3D printing was designed based on the technical characteristics of additive manufacturing. The samples in the diameters of 3 mm and 5 mm were 3D-printed by selective laser melting; meanwhile, the corresponding post-treatments for the samples were carried out, including the removal of support structure, the insulation protection of heater, and the impregnation of active material. The results show that, the cathode can be heated to the work temperature in range of 900~1100 ℃ by the new heater assembly, and the emission current density at the cathode inflexion can achieved as 7.94 A·cm-2 at 1100 ℃ in water-cooled diode test.
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图 2 热子引腿结构：（a）简单圆柱；（b）和（c）异形台阶
Figure 2. Potential pin structures of the heaters: (a)column; (b)and(c)specific steps
图 5 3D打印的阴极热子组件样品宏观形貌
Figure 5. Macromorphology of the 3D-printed cathode-heater assembly sample
图 6 3D打印的阴极热子组件样品光学形貌
Figure 6. Optical morphology of the 3D-printed cathode-heater assembly sample
图 7 去除支撑结构的阴极热子组件样品
Figure 7. Cathode-heater assembly samples after removing the supporting columns
图 9 阴极热子组件样品绝缘防护处理
Figure 9. Cathode-heater assembly samples after the insulation protection treatment
图 12 不同制备工艺得到的阴极表面微观组织：（a）选择性激光熔化工艺；（b）常规粉末冶金工艺
Figure 12. Microstructures of the cathode surfaces: (a)SLM; (b)the conventional powder metallurgy process
图 13 测试用水冷阳极二极管外观形貌
Figure 13. Appearance of the water-cooled diode used in the cathode emission performance testing
图 14 阴极热子组件的阴极发射伏安特性
Figure 14. Voltage current characteristics of the cathode emission for the cathode-heater assembly
表 1 加热功率及阴极热子温度
Table 1. Heating powers and the corresponding temperatures of cathode and heater
热子电/V 热子加热功率/W 热子温度/℃ 阴极发射表面温度/℃ 阴极热子温差/℃ 6 12.30 983 830 153 7 16.03 1050 883 167 8 19.28 1129 941 188 9 22.95 1176 987 189 10 26.90 1233 1035 198 11 30.25 1272 1071 201 
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表 2 新型阴极热子组件的阴极表面能谱分析
Table 2. Energy spectrum analysis of the new type cathode-heater assembly surface
元素 质量分数/% 原子数分数/% O 13.90 59.73 Al 3.36 8.55 Ba 6.19 3.10 W 76.55 28.62
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