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摘要: 通过研究金属钼（Mo）在真空环境下蒸发速率和饱和蒸气压与温度的关系，探讨了蓝宝石单晶炉Mo隔热屏内胆的损坏机理。结果表明，蓝宝石单晶炉的核心工作温度在2100 ℃以上，每炉的高温阶段时间超过120 h，隔热屏内胆在高真空环境下产生蒸发，由电子显微结构可以看到Mo片表面疏松、多孔，厚度逐渐变薄、剥落，失去隔热作用。利用金属高温环境下的蒸发速率、饱和蒸气压和工作时间推算出金属因蒸发而造成的厚度变化公式，由公式测算出来蓝宝石单晶炉的隔热屏内胆变薄的趋势与实际使用寿命相吻合。由于金属钨（W）的熔点比钼更高，利用该公式可以测算出W在蓝宝石单晶炉最严苛的工作条件下几乎不会蒸发变薄，是一种理想的隔热屏内胆替代品。Abstract: The relationships of the evaporation rate, the saturated vapor pressure, and the working temperature of Mo in vacuum environment were investigated, and the damage mechanism of Mo inner heat shield in sapphire single crystal furnace was discussed. In the results, the core operating temperature of the sapphire single crystal furnace is above 2100 ℃, the high temperature period of each cycle is more than 120 h, and the inner heat shield evaporates in the high vacuum environment. It can be seen from the microstructure that the surface of Mo sheet is loose and porous, and the sheet thickness gradually becomes thin and peels off, losing the heat insulation effect. The formula of the thickness change due to the metal evaporation is deduced from the evaporation rate, the saturated vapor pressure, and the working time at high temperatures. The thickness change trend on the inner heat shield of sapphire single crystal furnace calculated by the formula coincides with the actual service life. Since the melting point of W metal is higher than that of Mo metal, it will hardly evaporate and become thinner under the most severe working conditions in the sapphire crystal furnace according to the calculation results by the formula. Therefore, W is an ideal substitute of the inner heat shield.
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Key words:
- sapphire /
- heat shield /
- molybdenum /
- vacuum /
- evaporate
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图 3 隔热屏内胆钼片高温蒸发后显微组织：（a）×500；（b）×100
Figure 3. SEM images of the molybdenum sheets used for the inner heat shield after the evaporation damage: (a) ×500; (b) ×100
图 4 W片用作隔热屏内胆的金相组织
Figure 4. Metallographic image of the tungsten sheets used for the inner heat shield
图 5 多炉使用后的W片隔热屏内胆宏观形貌
Figure 5. Macro morphology of the tungsten sheets used for the inner heat shield after the repeated use
表 1 不同温度下Mo和W的饱和蒸气压与蒸发速率
Table 1. Vapour pressure and evaporation rate of the molybdenum and tungsten at different temperatures
温度 / ℃ 饱和蒸气压 / Pa 蒸发速率 / (mg·cm−2·h−1) Mo W Mo W 1700 2×10−5 10−10 0.003 — 1800 1×10−4 2×10−9 0.020 6×10−7 1900 6×10−4 2×10−8 0.200 6×10−6 2000 0.003 2×10−7 0.800 6×10−5 2100 0.010 1×10−6 2.000 4×10−4 2200 0.030 6×10−6 5.000 0.002 2300 0.100 3×10−5 40.000 0.010 
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表 2 蓝宝石长晶炉内胆Mo片厚度测量结果
Table 2. Measurement results of the Mo sheet thickness in the sapphire single crystal furnace
cm 测量点 长晶炉数 原始厚度 1 2 3 4 5 测量点1 2.02 1.80 1.59 1.36 1.10 0.90 测量点2 2.04 1.83 1.60 1.36 1.09 0.88 测量点3 2.04 1.82 1.63 1.38 1.13 0.91
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