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摘要: 以氮气为保护气氛，在820～980 ℃下用La2O3刻蚀人造金刚石单晶表面，研究稀土氧化物La2O3刻蚀对人造金刚石单晶性能的影响。利用扫描电子显微镜观测刻蚀后金刚石单晶不同晶面的表面形貌，通过人造金刚石单晶表面粗糙度、单颗粒抗压强度、抗冲击韧性和铜基结合剂金刚石节块抗弯强度来表征刻蚀前后金刚石单晶性能的变化。结果表明：La2O3对金刚石{100}面和{111}面的刻蚀是各向异性的；当刻蚀温度从820 ℃升高到980 ℃时，{100}面表面粗糙度从0.40 μm增加至2.28 μm，{111}面表面粗糙度从0.70 μm增加到3.32 μm，金刚石单颗粒的抗压强度由未刻蚀金刚石的576 N降低到最小530 N，冲击韧性由92.94%下降到89.21%。当金刚石体积分数为5%时，刻蚀后金刚石节块的抗弯强度增幅达到17.9%。Abstract: The surface of the synthetic diamond single crystal was etched by La2O3 at 820~980 ℃ with the nitrogen as the protective atmosphere to systematically study the effect of La2O3 etching on the properties of diamond single crystal. The surface morphologies of the etched diamond single crystal in the different crystal planes were observed by scanning electron microscope. The properties of the diamond single crystal before and after La2O3 etching were characterized by surface roughness, single particle compressive strength, impact toughness, and bending strength of Cu-based bonder diamond segments. The results show that, the La2O3 etching of the diamond in the {100} and {111} plane is anisotropic. When the etching temperature increases from 820 ℃ to 980 ℃, the surface roughness of {100} plane increases from 0.40 μm to 2.28 μm, while the surface roughness of {111} plane increases from 0.70 μm to 3.32 μm. The single particle compressive strength of the diamond decreases from 576 N (without etching) to the minimum of 530 N, and the impact toughness decreases from 92.94% to 89.21%. When the volume fraction of diamond is 5%, the bending strength of the etched diamond segment increases by 17.9%.
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Key words:
- diamond single crystal /
- La2O3 /
- anisotropic /
- etching /
- surface roughness /
- mechanical properties
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图 1 980 ℃刻蚀（La2O3）金刚石表面微观形貌：（a）{111}面整体形貌；（b）{111}面局部放大；（c）{100}面整体形貌；（d）{100}面局部放大
Figure 1. SEM images of the diamond surface etched by La2O3 at 980 ℃: (a) overall perspective of {111} plane; (b) local enlarged image of {111} plane; (c) overall perspective of {100} plane; (d) local enlarged image of {100}plane
图 2 不同温度La2O3刻蚀后金刚石表面粗糙度
Figure 2. Surface roughness of the diamond etched by La2O3 at different temperatures
图 3 不同刻蚀温度La2O3刻蚀后金刚石的单颗粒抗压强度
Figure 3. Single particle compressive strength of the diamond etched by La2O3 at different temperatures
表 1 不同温度下La2O3刻蚀后金刚石的抗冲击韧性
Table 1. Impact toughness of the diamond etched by La2O3 at different temperatures
温度 / ℃ 抗冲击韧性 / % 和原始金刚石的差值 / % 820 92.38 ‒0.56 860 91.42 ‒1.52 900 91.02 ‒1.92 940 90.22 ‒2.72 980 89.21 ‒3.73 
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